Karl suss ma6 manual

MA6/BA6 Standard Operating Procedure TES Rev. 06/17/ Karl Suss MA6/BA6 Mask Aligner Procedure General Overview: • The intensities calibrated are i‐line (nm) and h‐line ( nm). These were last calibrated at mW/cm2 for nm and mW/cm2 for nm.  · Karl Suss MA6 User Manual 3. Equipment Tweezers N2 gun Vacuum wand 4. Materials N/A 5. Protective Equipment Eye Protection: safety glasses must be worn at all times. Hand Protection: vinyl or latex-free gloves. 6. Engineering and/or Administrative Controls The MA6 is located in the Sub micron Room. Page 1. Karl Suss MJB-3 Mask Aligner User’s Manual The MA6 has upgraded optics designed to output in the mid-UV Service manuals, schematics, eproms for electrical technicians. Ma6 Service Manual - www.doorway.ru The Karl Suss MA6 is a top and bottom side mask aligner used for fine lithography down to 1 micron or below. 2.

The Karl Suss MA6 is a top and bottom side contact lithography printer used for fine line lithography down to 1 micron or better. It is capable of processing 4-inch substrate. After reading this manual, the User should be able to describe a typical MA6 process for both top and backside alignment, explain the theory. Karl Suss MA6 Mask Aligner Standard Operating Procedure Faculty Supervisor: Prof. Robert White, Mechanical Engineering (x) Safety Office: Peter Nowak x (Just dial this directly on any campus phone.) () (From off-campus or from a cell phone) Tufts Emergency Medical Services are at x Revised: Decem Warnings: 1. Karl Suss MA6 Mask Aligner. Figure 1: MA6 Mask Aligner. Introduction. The Karl Suss MA6 is a top and bottom side contact lithography printer used for fine line lithography down to 1 micron or better. It is capable of processing 4-inch substrate. After reading this manual, the User.

View and Download SUSS MA6 user manual online. Mask Aligners. MA6 laboratory equipment pdf manual download. SUSS. MJB 3. MASK ALIGNER. Operator's Reference Manual. Model No. KARL SUSS equipment is designed to protect the user against all possible hazards. Karl Süss mask aligner MA6 · Manual mask aligner for samples > 5 x 5 mm2, Max Size 4" · W Hg light source · Broadband light source nm (nm).