Karl suss ma6 user manual

 · Karl Suss MA6 User Manual 3. Equipment Tweezers N2 gun Vacuum wand 4. Materials N/A 5. Protective Equipment Eye Protection: safety glasses must be worn at all times. Hand Protection: vinyl or latex-free gloves. 6. Engineering and/or Administrative Controls The MA6 is located in the Sub micron Room. Page 1. The Karl Suss MA6 is a top and bottom side mask aligner used for fine lithography down to 1 micron or below. 2. W mercury arc lamp i-line (nm) with "smart power supply" is capable of operating in constant power mode, or constant intensity mode. The default is constant intensity mode. In this mode, the lamp deteriorates; the power is. The Karl Suss MA6 is a top and bottom side contact lithography printer used for fine line lithography down to 1 micron or better. After reading this manual, the User should be able to describe a typical MA6.

Karl Suss MA6 User Manual 3. Equipment Tweezers N2 gun Vacuum wand 4. Materials N/A 5. Protective Equipment Eye Protection: safety glasses must be worn at all times. Hand Protection: vinyl or latex-free gloves. 6. Engineering and/or Administrative Controls The MA6 is located in the Sub micron Room. Page 1. The Karl Suss MA6 is a top and bottom side contact lithography printer used for fine line lithography down to 1 micron or better. It is capable of processing 4-inch substrate. After reading this manual, the User should be able to describe a typical MA6 process for both top and backside alignment, explain the theory. MA6/BA6 Standard Operating Procedure TES Rev. 06/17/ Karl Suss MA6/BA6 Mask Aligner Procedure General Overview: • The intensities calibrated are i‐line (nm) and h‐line ( nm). These were last calibrated at mW/cm2 for nm and mW/cm2 for nm.

This makes alignment using one objective easier. Applicable Documents a) Karl Suss MA6 Operating manual - hardcopy located at machine. Authorized users for Karl Suss MA6 Mask Aligner. The following users have been with manual mask loading, soft contact print and WEC-type contact. The SUSS MA6 Mask Aligner is the which use crosshairs for reference. xk @@@5. 25kV m manual alignment can be a tedious.